PREFERRED ORIENTATION OF SIC COATINGS OBTAINED BY MOCVD AND ITS CORRELATION WITH THE PYROLYSIS BY-PRODUCTS OF SI(CH3)(4)

Authors
MADIGOU V VEINTEMILLAS S RODRIGUEZCLEMENTE R FIGUERAS A COMBESCURE C ARMAS B
Citation
V. Madigou et al., PREFERRED ORIENTATION OF SIC COATINGS OBTAINED BY MOCVD AND ITS CORRELATION WITH THE PYROLYSIS BY-PRODUCTS OF SI(CH3)(4), Vacuum, 45(10-11), 1994, pp. 1119-1120
Citations number
3
Categorie Soggetti
Physics, Applied
Journal title
Vacuum → ACNP
ISSN journal
0042207X
Volume
45
Issue
10-11
Year of publication
1994
Pages
1119 - 1120
Database
ISI
SICI code
0042-207X(1994)45:10-11<1119:POOSCO>2.0.ZU;2-E