ENERGY-SPECTRA OF REFLECTED AND SPUTTERED PARTICLES IN MAGNETRON DEPOSITION SYSTEMS

We have studied by the Monte Carlo (MC) simulation technique the trans port through the plasma of sputtered particles and gas atoms reflected at the cathode in a magnetron system. The energy spectra and the tota l energy transported to the substrate by these two fluxes of particles are calculated. Results are presented for; different cathode species and for various pressures of the discharge gas. The energy spectra of the reflected particles show a strong dependence on the cathode materi al and this may have an influence on the properties of the thin films produced.