We have studied by the Monte Carlo (MC) simulation technique the trans
port through the plasma of sputtered particles and gas atoms reflected
at the cathode in a magnetron system. The energy spectra and the tota
l energy transported to the substrate by these two fluxes of particles
are calculated. Results are presented for; different cathode species
and for various pressures of the discharge gas. The energy spectra of
the reflected particles show a strong dependence on the cathode materi
al and this may have an influence on the properties of the thin films
produced.