Reflection second-harmonic generation from the polished waveguide end
face is used to investigate the second-order nonlinear optical propert
ies of as-exchanged and annealed proton-exchanged waveguides in z-cut
LiTaO3. It is found that proton exchange results in a strongly reduced
nonlinearity which, however, can be restored by thermal annealing. Se
lective etching is used as a method to further investigate the structu
ral changes following proton exchange and annealing. A correlation is
found between the etching properties and the nonlinear optical propert
ies. The results are discussed and related to the hydrogen concentrati
on profile using a linear diffusion model for the anneal process.