ANALYSIS AND APPLICATION OF A VISCOELASTIC MODEL FOR SILICON OXIDATION

The numerical modeling of the oxidation of silicon is analyzed from a nonlinear viscoelastic approach. Its mechanical and stress dependent p arameters are determined for silicon dioxide and nitride. The study fo cuses on the theological behavior of the materials. The two dimensiona l simulations of silicon cylinders oxidation and local oxidation of si licon processing reveal that at 1000 degrees C, a nonlinear viscous mo deling is equivalent to the nonlinear viscoelastic one. But, for lower temperatures, the discrepancies between these two models, observed in the stress calculation and final oxide shape, demonstrate the necessi ty for a complete nonlinear viscoelastic formulation. Finally, the cal ibrated model is used to study the growth of a recessed isolation stru cture. The investigations quantify the influence of geometrical parame ters of the silicon groove on the shape of the final isolation oxide ( e.g., parameters such as the silicon overetch under the pad oxide, the depth of silicon etching, the slope of the silicon sidewall and the s ilicon concave corner rounding).