The scanning tunneling microscope is used to study the boron-doped Si(
111) surface as a function of annealing times and temperatures. The su
rface structure is found to be determined by the concentration of B. W
hen the substitutional B concentration is less than 1% of the top 1X1
bilayer atoms, the surface is largely 7X7 but surrounded by adatom-cov
ered 1X1 regions (which have higher B concentration). When the B conce
ntration is more than 3%, the whole surface will be adatom-covered 1X1
regions including (root 3 X root 3)R 30 degrees structures. The (root
3 X root 3)R 30 degrees domains will increase with the B concentratio
n. Because 7X7 can only exist in the region with low B concentration,
the growth of 7 X 7 is slowed down. Further annealing at 560 degrees C
can convert 2X2, c(4X2) into 7X7 and 9X9. Sides of the 7X7 domain pre
ferentially grow along the three equivalent [11 $$($) over bar 2] dire
ctions. The adatom-covered 1X1 regions are bounded by faulted halves o
f the 7X7 domains. The dark sites of 7X7 are observed and counted. The
y are further interpreted in terms of a B substitution model. The patt
ern of bright and dark atoms in (root 3 X root 3)R 30 degrees domains
is analyzed and a criterion for a B stabilized Si-(root 3 X root 3)R 3
0 degrees structure is obtained.