MONTE-CARLO SIMULATION OF ELECTRON-BEAM EXPOSURE DISTRIBUTIONS IN THERESIST ON STRUCTURES WITH HIGH-T(C) SUPERCONDUCTING THIN-FILMS

The spatial distributions of absorbed electron energy density in PMMA on structures incorporating YBa2CU3O7 high-T(c) superconducting thin f ilms deposited on different substrates were determined using a Monte C arlo simulation (MCS), which takes into account the exact boundary con ditions on interfaces between different layers of the target. The abil ity of our Monte Carlo program to accurately simulate the radial expos ure distributions was demonstrated. The effects of substrate material (SrTiO3 and MgO), beam energy (40 and 80 x 10(-16) J) and high-tempera ture superconducting (HTS) film thickness (100 and 300 nm) on these di stributions were investigated. The distributions obtained in this work can further be employed in a proximity effect correction algorithm as well as in a proper development model.