We have fabricated and tested 10 x 10 independently addressable vertic
al-cavity surface-emitting laser diode arrays. Arrays with 55 mum acti
ve diameter devices show an average threshold current density of 590 A
/cm2 and an excellent homogeneity of the output characteristics over t
he full array size with maximum CW output powers of 12 mW. Broad area
laser diodes with active diameters of 75 mum reach output powers of 18
mW for CW operation and 180 mW under pulsed conditions. Small-signal
modulation bandwidths are beyond 10 and 8 GHz for the 55 and 75 mum de
vices, respectively.