SIMS AND RBS ANALYSIS OF LEACHED GLASS - RELIABILITY OF RSF METHOD FOR SIMS QUANTIFICATION

The reliability of the relative sensitivity factor (RSF) approach for secondary ion mass spectrometry (SIMS) quantification of the leached l ayers on glass was investigated by measuring comparable samples of gla ss with SIMS and RES (Rutherford backscattering spectrometry). The RSF factors were calculated using the nominal bulk compositions. Accurate results can be obtained only when the leached layer and the bulk glas s have the same major elemental compositions (Si and O) and the matrix effect is inhibited. The concentrations of the different elements in the leached layer obtained from the comparable samples measured by SIM S and RES are coincident within a factor of 2.