Multilevel high T(c) SQUIDs, suitable for digital circuit applications
, have been fabricated and tested. The devices employ a YBa2Cu3O7-delt
a (YBCO) ground plane, an epitaxial SrTiO3 insulator, and a YBCO micro
strip layer. Junctions are formed by the step-edge grain boundary proc
ess, with a ground plane contact for the ''low'' side of each junction
, using only isotropic sputtering and milling techniques. Control curr
ent is directly injected in a microstrip segment of the SQUID loop, al
lowing us to measure the microstrip inductance, and thus to infer the
magnetic penetration depth of the YBCO. The SQUIDs are operational abo
ve 77 K, at which temperature we infer a penetration depth of 350 nm.
The temperature dependence of the penetration depth is found to be in
reasonable agreement with the Gorter-Casimir form close to T(c). (C) 1
994 American Institute of Physics.