By using a technique of laser-desorption mass spectrometry, the kineti
cs of chemi- and physisorption of dimethylcadmium on a Si(100) surface
coated with the native oxide film or photodeposited cadmium film was
studied. The XeCl and KrCl laser-induced dissociation, ionization, and
desorption of adsorbed molecules and their fragments were also invest
igated. The pathways and the mechanism of laser-induced chemical proce
sses are discussed.