The newly developed technique of low-pressure single aerosol source MO
CVD (wet MOCVD) has been applied to prepare thin films of YBa2Cu3Ox an
d Bi2Sr2CaCu2Ox. The influence of the deposition rate, p(O2)-T conditi
ons, film stoichiometry on the phase composition, orientation and supe
rconducting properties of the films was studied and compared for both
systems. Thin films of YBa2Cu3Ox with high-T(c)(end) = 92 K, j(c)(77 K
) = 1.7 x 10(6) A cm-2; Bi2Sr2CaCU2Ox with T(c)(end) = 84 K, j(c)(77 K
) = 1 X 10(4) A CM-2 were deposited. On the basis of the crystal chemi
stry approach the conditions for the various orientations were establi
shed.