STATUS OF RESEARCH-AND-DEVELOPMENT IN COORDINATE-MEASUREMENT TECHNOLOGY

Authors
DICH LZ LATYEV SM
Citation
Lz. Dich et Sm. Latyev, STATUS OF RESEARCH-AND-DEVELOPMENT IN COORDINATE-MEASUREMENT TECHNOLOGY, Journal of optical technology, 61(9), 1994, pp. 636-640
Citations number
NO
Categorie Soggetti
Optics
Journal title
Journal of optical technology → ACNP
ISSN journal
10709762
Volume
61
Issue
9
Year of publication
1994
Pages
636 - 640
Database
ISI
SICI code
1070-9762(1994)61:9<636:SORICT>2.0.ZU;2-W
Abstract
This paper discusses problems involved in developing and operating coo rdinate-measuring machines. The status of this area of precision instr umentation is analyzed. These problems are made critical not only by t he requirements of the machine-tool industry but also by those of the microelectronics industry, both of which use coordinate tables, step-u p gears, and other equipment in which precise coordinate measurements are necessary.