Jw. Ager et al., SPATIALLY-RESOLVED MEASUREMENT OF LATTICE DAMAGE IN ALPHA-PARTICLE-IRRADIATED TYPE-IIA NATURAL DIAMOND BY CONFOCAL PHOTOLUMINESCENCE MICROSCOPY, Journal of applied physics, 76(7), 1994, pp. 4050-4053
Confocal fluorescence microscopy has been used to measure the three-di
mensional distribution of the H3 color center produced in type IIa nat
ural diamonds by 5 MeV He+ irradiation at a total fluence of 8 x 10(15
) cm-2. The peak of the H3 emission occurs 16 mum below the surface of
the irradiated side of the diamond, which is in fair agreement with t
he peak of the vacancy distribution predicted by a Monte Carlo calcula
tion (transport of ions in matter or TRIM). The H3 distribution is bro
ader in the direction normal to the surface (10 mum full width at half
maximum) than the TRIM calculation. This is attributed to diffusion o
f vacancies caused by self-annealing during irradiation.