The behavior of radiation-induced carbon-related defects in high-resis
tivity silicon detectors has been investigated. The defects were intro
duced by alpha-particle irradiation and investigated by deep-level tra
nsient spectroscopy. An unusual defect behavior consists in low-temper
ature annealing, including self-annealing at room temperature, of the
interstitial carbon C(i) with a simultaneous increase of the C(i)-O(i)
-complex concentration. The kinetic parameters of the process have bee
n determined from the increase of the C(i)-center concentration versus
time. Two annealing velocities have been observed, which arise from d
ifferent heat treatments during the detector fabrication process.