INCORPORATION OF ELASTIC-SCATTERING INTO COMPOSITION DEPTH PROFILE RECONSTRUCTION FROM ANGLE-RESOLVED AUGER XPS DATA

Authors
DWYER VM
Citation
Vm. Dwyer, INCORPORATION OF ELASTIC-SCATTERING INTO COMPOSITION DEPTH PROFILE RECONSTRUCTION FROM ANGLE-RESOLVED AUGER XPS DATA, Surface and interface analysis, 21(9), 1994, pp. 637-642
Citations number
24
Categorie Soggetti
Chemistry Physical
Journal title
Surface and interface analysis → ACNP
ISSN journal
01422421
Volume
21
Issue
9
Year of publication
1994
Pages
637 - 642
Database
ISI
SICI code
0142-2421(1994)21:9<637:IOEICD>2.0.ZU;2-Z
Abstract
Neglecting elastic scattering in the inversion process for reconstruct ing composition-depth profiles from angle-resolved Auger/XPS spectra l eads to several effects that are likely to be misinterpreted. For exam ple, there appears to be an erroneous diffusion of the substrate mater ial to the surface in the case of a simple overlayer. In addition, the thickness of the overlayer is likely to be overestimated by typically approximately 20% for Auger/XPS energies.