AN AMPEROMETRIC MICROSENSOR ARRAY WITH 1024 INDIVIDUALLY ADDRESSABLE ELEMENTS FOR 2-DIMENSIONAL CONCENTRATION MAPPING

A microsensor array with 32 rows and 32 columns of 1024 individual add ressable amperometric cells on a 30 mm x 30 mm Si substrate has been d eveloped. The performance of the two-dimensional measuring system is d escribed with an example of a Clark-type oxygen-measurement system, le ading to a novel nearly real-time oxygen-concentration mapping importa nt for transplantation medicine and biosensor applications. Special at tention has been paid to an easy, reliable mass-production process wit h integrated electrolyte and membrane immobilization, resulting in low -cost devices. Parameters influencing the measurements can be chosen b y a specially developed software that allows nearly real-time amperome tric measurements to be realized after an automated calibration of the whole array. As a sub-sensor for biosensors based on oxygen consumpti on or hydrogen peroxide production, exciting new possibilities for two -dimensional concentration mapping of many other analytes open new hor izons in analytical chemistry.