ANALYSIS OF THE EFFECTS OF SUBSTRATE-TEMPERATURE, CONCENTRATION OF TIN CHLORIDE AND NATURE OF DOPANTS ON THE STRUCTURAL AND ELECTRICAL-PROPERTIES OF SPRAYED SNO2 FILMS
A. Messad et al., ANALYSIS OF THE EFFECTS OF SUBSTRATE-TEMPERATURE, CONCENTRATION OF TIN CHLORIDE AND NATURE OF DOPANTS ON THE STRUCTURAL AND ELECTRICAL-PROPERTIES OF SPRAYED SNO2 FILMS, Journal of Materials Science, 29(19), 1994, pp. 5095-5103
The correlations between structural and electrical properties of spray
ed SnO2 films have been investigated as a function of substrate temper
ature (380-560 degrees C), concentration of tin precursor (0.02-0.8 M
SnCl4) and the nature of the doping agent (chlorine, fluorine, antimon
y). High-resolution transmission ef ectron microscopy has shown that c
hlorine or fluorine incorporation promotes the same type of defects, w
hich are [0 1 1] twins. These latter behave as neutral defects, the de
nsity of which limits the carrier mobility of degenerated fluorine- or
chlorine-doped films to around 20 cm(2) V-1 s(-2). The situation is t
otally different with antimony. Below the solubility limit in the SnO2
lattice (3%-4% Sb/Sn), Sn4+ are substituted by Sb5+, creating two con
duction electrons per site and acting as point-charged defects which l
ower carrier mobility. Above this limit, the Sb3+ and Sb5+ forms coexi
st and are associated with an extremely large concentration of structu
ral defects, especially twins induced by the Sb3+ species. These ions
enter two-dimensional arrangements on both sides of the twins, making
them planar charged defects.