ELECTRON-MOBILITY AND DENSITY-OF-STATES IN A-C-H

The electrical properties and electron drift mobility in films of amor phous hydrogenated carbon have been studied. The films were grown by r f decomposition of CH4+Ar/H-2 mixtures at temperatures of 25 and 250 d egrees C. The experimental data can be explained satisfactorily under the assumption that the distribution of the density of states in the t ail of the conduction band is Gaussian with a characteristic temperatu re of 1000-1400 K. The electron mobility is estimated to be more than 1 cm(2)/(V.s) for all the films studied.