A. Bubenzer et al., PROCESS TECHNOLOGY FOR MASS-PRODUCTION OF LARGE-AREA A-SI SOLAR MODULES, Solar energy materials and solar cells, 34(1-4), 1994, pp. 347-358
The production of large-area (0.6 x 1.0 m(2)) modules takes place in a
fully automated semiconductor line and a semi-automated panel finishi
ng line. The a-Si deposition occurs in a multichamber reactor for para
llel processing of p-, i- and n-layers which provides for flexibility
in the cell design (single- and multijunction structures) without sign
ificant loss in throughput. Specific aspects of module construction, n
amely the properties of commercially available large-area TCO substrat
es, scale-up of the PECVD process, and patterning for color-neutral se
mitransparent modules, are discussed. The module production is now bas
ed exclusively on a-Si/a-Si tandem structures. The average power outpu
t is initially 36 W, and stabilizes around 15% below that level.