PROCESS TECHNOLOGY FOR MASS-PRODUCTION OF LARGE-AREA A-SI SOLAR MODULES

The production of large-area (0.6 x 1.0 m(2)) modules takes place in a fully automated semiconductor line and a semi-automated panel finishi ng line. The a-Si deposition occurs in a multichamber reactor for para llel processing of p-, i- and n-layers which provides for flexibility in the cell design (single- and multijunction structures) without sign ificant loss in throughput. Specific aspects of module construction, n amely the properties of commercially available large-area TCO substrat es, scale-up of the PECVD process, and patterning for color-neutral se mitransparent modules, are discussed. The module production is now bas ed exclusively on a-Si/a-Si tandem structures. The average power outpu t is initially 36 W, and stabilizes around 15% below that level.