SURFACE MICROSTRUCTURES OF ZNO COATED SNO2-F FILMS

ZnO films of 100 Angstrom thick were coated on textured SnO2:F films u sing DC magnetron sputtering to improve hydrogen plasma durability: Th e surface microstructure and the plasma durability of the films were i nvestigated using a scanning electron microscope (SEM), reflection hig h energy electron diffraction (RHEED) and optical measurements. It was found that the ZnO coated films exhibited high durability against hyd rogen plasma. The well ordered microstructure of ZnO was considered to act as a good barrier against hydrogen diffusion into the SnO2:F film s.