INTERNAL-FRICTION IN THIN-FILMS AND MEMBRANES

This paper presents experimental results of dynamic measurements of th in films and membranes. Through the dynamic properties of film/substra te or multilayer composites, reflected by their eigen frequencies, the adhesion between film and substrate and between multilayers was also studied. The same approach was used to study in situ the stress evolut ion in growing films. Each addition of a monoatomic layer caused upwar d stress relaxation, and internal friction measurements indicate concu rrent relaxations. The in situ dynamic measurement provides unique inf ormation on the evolution of growing ultrathin films. Further studies on their surface morphology and microstructure are in progress.