The shape, size and electronic properties of Au clusters deposited ont
o Si(111) and graphite substrates are analyzed by scanning tunneling m
icroscopy (STM) in ultrahigh vacuum. Deposits are sputtered from our A
u STM tip by applying a sequence of voltage pulses between the tip and
the substrate. Their shapes are dome type with well-controlled diamet
er in the nanometer scale. This technique enables us to generate array
s of Au clusters with desired periodicity and size. Such structures ar
e stable and observable many days after deposition. Our results provid
e a practical example that one can create nanometer-scale structures b
y STM. The electronic structure of Au deposits is investigated by mean
s of scanning tunneling spectroscopy. The I-V characteristics and CITS
measurements reveal peculiar properties because of reduced cluster di
mensions.