T. Salditt et al., KINETIC ROUGHNESS OF AMORPHOUS MULTILAYERS STUDIED BY DIFFUSE-X-RAY SCATTERING, Physical review letters, 73(16), 1994, pp. 2228-2231
We apply the scattering geometry of grazing incidence and exit angles
to study the diffuse scattering of an amorphous, magnetron sputtered W
/Si multilayer. Only this technique allows for the full range of paral
lel momentum transfer necessary to determine the height-height self- a
nd cross-correlation functions from the structure factor of the rough
interfaces and the exit-angle-resolved intensity, respectively. The se
lf-correlation functions show the logarithmic scaling behavior predict
ed by the Edwards-Wilkinson Langevin equation, which describes the kin
etic roughening of a growing surface. The cross-correlation functions
also agree with those derived from the equation.