KINETIC ROUGHNESS OF AMORPHOUS MULTILAYERS STUDIED BY DIFFUSE-X-RAY SCATTERING

We apply the scattering geometry of grazing incidence and exit angles to study the diffuse scattering of an amorphous, magnetron sputtered W /Si multilayer. Only this technique allows for the full range of paral lel momentum transfer necessary to determine the height-height self- a nd cross-correlation functions from the structure factor of the rough interfaces and the exit-angle-resolved intensity, respectively. The se lf-correlation functions show the logarithmic scaling behavior predict ed by the Edwards-Wilkinson Langevin equation, which describes the kin etic roughening of a growing surface. The cross-correlation functions also agree with those derived from the equation.