CORROSION OF REACTOR WALL SURFACES BY WF(6)

The reactions of tungsten hexafluoride (WF6) on stainless steel, tanta lum, platinum, nickel, and Monel 400(R) were investigated using temper ature-programmed desorption and Auger electron spectroscopy in ultrahi gh vacuum. The high reactivity of stainless steel and tantalum surface s indicate that they are not suitable materials for tungsten chemical vapor deposition reactors. Nickel and Monel 400(R) are much less react ive and are suitable for use below 800K. Platinum does not react with WF6 below 600K and may be suitable for use at higher temperatures. Mas s spectrometer cracking patterns for WF6, WOF4, and WO2F2 were measure d.