THE BEIJING METAL VAPOR VACUUM-ARC ION-SOURCE PROGRAM

Authors
ZHANG HX ZHANG XJ ZHOU FS ZHANG SJ LI Q HAN ZE
Citation
Hx. Zhang et al., THE BEIJING METAL VAPOR VACUUM-ARC ION-SOURCE PROGRAM, Review of scientific instruments, 65(10), 1994, pp. 3088-3090
Citations number
6
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
Journal title
Review of scientific instruments → ACNP
ISSN journal
00346748
Volume
65
Issue
10
Year of publication
1994
Pages
3088 - 3090
Database
ISI
SICI code
0034-6748(1994)65:10<3088:TBMVVI>2.0.ZU;2-Y
Abstract
Work on metal vapor vacuum arc (MEVVA) ion source development was init iated at the Institute of Low Energy Nuclear Physics, Beijing Normal U niversity, in 1988. MEVVA ion sources I, II, IIA, and III have been de signed, fabricated, and tested, and an ion implantation facility with three MEVVA ion sources has been developed and is now undergoing testi ng. Here the status of the MEVVA ion source research and development p rogram is described.