USE OF CAPACITANCE DIAPHRAGM GAUGES AT PRESSURES DOWN TO 10(-6) TORR

Authors
STRAUB HC RENAULT P LINDSAY BG SMITH KA STEBBINGS RF
Citation
Hc. Straub et al., USE OF CAPACITANCE DIAPHRAGM GAUGES AT PRESSURES DOWN TO 10(-6) TORR, Review of scientific instruments, 65(10), 1994, pp. 3279-3281
Citations number
10
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
Journal title
Review of scientific instruments → ACNP
ISSN journal
00346748
Volume
65
Issue
10
Year of publication
1994
Pages
3279 - 3281
Database
ISI
SICI code
0034-6748(1994)65:10<3279:UOCDGA>2.0.ZU;2-N
Abstract
The useful range of a capacitance diaphragm gauge is extended down to 1 x 10(-6) Torr with an uncertainty of +/- 10(-7) Torr using computer- based averaging. Gauge linearity is measured by observing the deflecti on of the diaphragm by the force of gravity. Precise pressure incremen ts are generated by tilting the gauge through a range of accurately me asured angles. By this procedure the gauge is observed to be linear to within +/- 1% plus 10(-7) Torr between 1 x 10(-6) and 8 x 10(-3) Torr . Additionally, the deflection of the center of the diaphragm per unit pressure is found to be 2 x 10(-5) m Torr-1.