The effect of fluorine incorporation on dielectric properties has been
studied for a series of polyimides in order to distinguish between se
veral contributing mechanisms to the generally observed decrease in th
e relative permittivity. Using low-frequency capacitance measurements
after exhaustive in situ drying, in conjunction with refractive index
measurements, the overall decrease in dielectric constant was semiquan
titatively assigned between changes in the three modes of polarization
via the use of fluorine/hydrogen and symmetric/unsymmetric analogs. T
hese results suggest that replacement of hydrogen with fluorine always
lowers the dielectric constant increment due to the electronic mode o
f polarization, has little effect on the atomic increment, and in the
case of asymmetric fluorine substitution, results in an increase in th
e orientation increment. Values for each of these effects are reported
.