ION-BEAM ETCHING FACILITY

Authors
KOVAL YI ILICHEV EV
Citation
Yi. Koval et Ev. Ilichev, ION-BEAM ETCHING FACILITY, Instruments and experimental techniques, 37(3), 1994, pp. 333-338
Citations number
6
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Instruments and experimental techniques → ACNP
ISSN journal
00204412
Volume
37
Issue
3
Year of publication
1994
Part
2
Pages
333 - 338
Database
ISI
SICI code
0020-4412(1994)37:3<333:IEF>2.0.ZU;2-7
Abstract
A laboratory facility for ion-beam etching is described. The condition s of beam transportation are analyzed. The possibility of producing mi crostructures with higher aspect ratio is demonstrated. It is shown th at the etched sample can be cooled down to liquid-nitrogen temperature s and so the superconducting parameters of HTSC samples can be monitor ed during the etching process.