DETERMINATION OF ELECTRON-CONCENTRATION IN AN RF DISCHARGE USING A FABRI-PEROT CAVITY

Authors
SMIRNOV AS USTAVSHCHIKOV AY FROLOV KS
Citation
As. Smirnov et al., DETERMINATION OF ELECTRON-CONCENTRATION IN AN RF DISCHARGE USING A FABRI-PEROT CAVITY, Instruments and experimental techniques, 37(3), 1994, pp. 342-344
Citations number
4
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Instruments and experimental techniques → ACNP
ISSN journal
00204412
Volume
37
Issue
3
Year of publication
1994
Part
2
Pages
342 - 344
Database
ISI
SICI code
0020-4412(1994)37:3<342:DOEIAR>2.0.ZU;2-9
Abstract
A method of determining the electron concentration in an RF discharge plasma in diode systems based on measuring the parameters of a Fabri-P erot cavity in the 6-10-mm wavelength band is described. The cavity is formed by the aluminum electrodes of a discharge chamber, and its Q-f actor in experiments can reach 2000. The detection limit with respect to electron concentration is 4.10(8) cm-3.