CO2 LASER-INDUCED THERMAL CHEMICAL-VAPOR-DEPOSITION OF POLYMERS

Chemical reactions in the gas phase which are induced by CO2 lasers an d lead to the formation of organic or organometallic polymers are revi ewed. The reactions involve the thermolysis of heterocycloalkanes, alk oxygermanes and acyclic organosilanes, the explosive decomposition of fluoromethylsilanes, and thermal chemistry in mixtures of silane with organic compounds. Attention is given to the mechanism of the gas-phas e reactions as well as to the structure of the polymers.