APPLICATION OF THE GLOW-DISCHARGE MASS-SPECTROMETRY (GDMS) FOR THE MULTIELEMENT TRACE AND ULTRATRACE ANALYSIS OF SPUTTERING TARGETS

Glow discharge mass spectrometry using a VG9000 high resolution mass s pectrometer has been applied to both the multi-element trace and ultra trace analyses of sputtering target materials, i.e. aluminium-based a lloys, cobalt-based alloys, titanium and platinum. Element dependent r elative sensitivity factors (RSF) have been determined using reference materials in order to provide the possibility for quantitative analys es. Aluminium-based and cobalt-based alloys have been extensively anal ysed to demonstrate precision of GDMS analyses. Detection limits in th e ng/g and sub-ng/g ranges, i.e. 0.2 ng/g for U and Th have been deter mined in aluminium-based alloys. Comparative analyses for alloy compon ents in cobalt-based alloys as well as trace concentrations in titaniu m have been performed. GDMS has been also applied to multi-element dep th profile analyses in contaminated and noncontaminated platinum targe ts.