STRESS AND STRAIN RELAXATION BEHAVIOR IN HIPED SILICON NITRIDES

Authors
WERESZCZAK AA KIRKLAND TP FERBER MK
Citation
Aa. Wereszczak et al., STRESS AND STRAIN RELAXATION BEHAVIOR IN HIPED SILICON NITRIDES, Journal of materials science letters, 13(20), 1994, pp. 1469-1471
Citations number
7
Categorie Soggetti
Material Science
Journal title
Journal of materials science letters → ACNP
ISSN journal
02618028
Volume
13
Issue
20
Year of publication
1994
Pages
1469 - 1471
Database
ISI
SICI code
0261-8028(1994)13:20<1469:SASRBI>2.0.ZU;2-K