2-DIMENSIONAL MAGNETIC MICROSENSOR WITH ON-CHIP SIGNAL-PROCESSING FORCONTACTLESS ANGLE MEASUREMENT

The reported CMOS microsystem is the key element for accurate angle me asurements. In combination with a permanent magnet, it is used for var ious wear free angular positioning control systems for automotive and industrial applications covering the full 360 degrees range. The integ rated system includes a two-dimensional (2-D) magnetic microsensor (30 x 30 mu m(2) active area, offset compensation, and signal conditionin g circuitry, A navel approach for the angle calculation is presented u sing an on-hoard incremental ADC, A, bitstream representing the angula r position of the applied permanent magnet is provided at the system o utput. The system achieves a 1 degrees angular resolution with 9 nW po wer consumption and a permanent magnet of 100 mT. The chip is fabricat ed in a generic 2-mu m, double-poly. double-metal CMOS process and cov ers an area of 2.6 x 4.1 mm(2).