Gas phase viscosities of dichlorosilane, trichlorosilane, and tetraflu
orosilane have been determined experimentally relative to the viscosit
y of argon in the temperature range of 40-200-degrees-C using a consta
nt-volume transpiration viscometer. The data have been compared with t
he literature values for silane compounds. The accuracy of the method
has been checked by comparing the viscosity of nitrogen with the liter
ature values.