MICROFABRICATED OPTICAL CHOPPER

A micromachined chopper has demonstrated modulation of coherent and in coherent light. The chopper uses an electrostatically driven lateral m icromotor to actuate a shutter plate across a through-substrate window . Test devices have been fabricated and exhibit operating frequencies ranging from 1 to 31 kHz and have stable deflection amplitudes of 400 mu m. Further optimizations of the design are discussed.