AUGER DEPTH PROFILE ANALYSIS OF DEEPLY BURIED INTERFACES

The requirements to be met for achieving good depth resolution for Aug er depth profiling of thin layers buried by a thick (more than 100 nm) overlayer are discussed, assuming that one uses rotated specimens and glancing angle of incidence. It is shown that the glancing angle of i ncidence is necessary to avoid the defect accumulation, while for redu cing the atomic mixing low ion energy is to be used. Depth profiling r esults of various multilayer systems are discussed. The dependences of the depth resolution on ion energy and angle of incidence show a tren d similar to those resulted by the TRIM code, but the absolute values of the calculated and measured depth resolutions are strongly differen t.