R. Rochotzki et al., PLASMA MODIFICATION OF POLYMER-FILMS STUDIED BY ELLIPSOMETRY AND INFRARED-SPECTROSCOPY, Physica status solidi. a, Applied research, 145(2), 1994, pp. 289-297
This polymer films (thickness d = 10 to 50 nm) modified in a low-press
ure plasma of air, oxygen, argon, or tetrafluoromethane (p = 10 to 100
Pa) are investigated. It is shown that the interaction between plasma
species (ions, electrons, radicals, UV quanta) and the polymer causes
structural changes in the surface and subsurface regions. The formati
on of a modified surface layer can be observed. Fourier transform infr
ared (FTIR) attenuated total reflection (ATR) spectroscopy is used for
the structural analysis of polymer modification. The structural chang
es detected by FTIR spectroscopy are accompanied by changes of optical
properties, like the refractive index. The optical modification effec
ts are investigated by spectroscopic ellipsometry (gamma = 300 to 800
nm). For the analysis of the modification depth a multilayer model has
to be applied to fit the ellipsometric data.