2ND-HARMONIC MODULATED PHOTO-REFLECTANCE IMAGING OF INTEGRATED-CIRCUITS

Authors
QIAN ZL ZHANG SY LU YS HE J TAO M
Citation
Zl. Qian et al., 2ND-HARMONIC MODULATED PHOTO-REFLECTANCE IMAGING OF INTEGRATED-CIRCUITS, Journal de physique. IV, 4(C7), 1994, pp. 203-206
Citations number
5
Categorie Soggetti
Physics
Journal title
Journal de physique. IV → ACNP
ISSN journal
11554339
Volume
4
Issue
C7
Year of publication
1994
Pages
203 - 206
Database
ISI
SICI code
1155-4339(1994)4:C7<203:2MPIOI>2.0.ZU;2-5
Abstract
The second harmonic imaging of the modulated photoreflectance (MPR) si gnals of integrated circuits has been obtained. The second harmonic im aging has special NDE capability for some surface and subsurface struc tures of semiconductor devices, particularly for the ion implantation process, based on the distinctive mechanism of the nonlinear MPR effec t.