Vg. Mikhalevich et al., THE INTERACTION OF FINE PARTICLES WITH LASER-GENERATED NONLINEAR SURFACE ACOUSTIC-WAVES, Journal de physique. IV, 4(C7), 1994, pp. 709-711
The cleaning of a silicon surface from dust particles using laser-indu
ced suface acoustic pulses is investigated. It is shown that nonlinear
acoustic waves displace particles not only perpendicular but also par
allel to the surface and are therefore more effective in particle remo
val than are linear acoustic waves.