We investigate in detail the creation of metastable dangling bond defe
cts in undoped hydrogenated amorphous silicon by illumination with pul
sed-light sources. Based on the electron-hole recombination model for
defect creation, the kinetics of the defect generation process is anal
yzed theoretically for different experimental conditions (pulse length
, pulse energy, repetition rate, and average intensity). These theoret
ical results are then compared to experimental observations using both
monochromatic and polychromatic (''white light'') pulse sources. Impl
ications of pulse illumination for accelerated testing of the stabilit
y of amorphous-silicon-based solar cells are also discussed.