FABRICATION OF LINBO3 PHASE GRATINGS BY EXCIMER-LASER ABLATION THROUGH A SILICA PHASE MASK

Authors
LUO GP LU YQ ZHU YY LU YL GUO XL GE CZ LIU ZG MING NB WU JW LU ZH
Citation
Gp. Luo et al., FABRICATION OF LINBO3 PHASE GRATINGS BY EXCIMER-LASER ABLATION THROUGH A SILICA PHASE MASK, JPN J A P 2, 35(12A), 1996, pp. 1593-1595
Citations number
12
Categorie Soggetti
Physics, Applied
Journal title
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS → ACNP
Volume
35
Issue
12A
Year of publication
1996
Pages
1593 - 1595
Database
ISI
SICI code
Abstract
Lithium niobate (LiNbO3) wafer phase gatings were fabricated by excime r pulsed ablation through a transmission silica phase mask grating. Su rface morphology of the LiNbO3 phase gratings was studied using an ato mic force microscope as well as an optical microscope. Crystal structu res and the diffraction patterns of the gratings were characterized by X-ray diffraction and using a He-Ne laser beam, respectively.