ENHANCED TOPOGRAPHY IMAGING IN THE SCANNING ELECTRON-MICROSCOPE

Authors
GRIFFIN NS
Citation
Ns. Griffin, ENHANCED TOPOGRAPHY IMAGING IN THE SCANNING ELECTRON-MICROSCOPE, Measurement science & technology, 5(11), 1994, pp. 1403-1406
Citations number
4
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Measurement science & technology → ACNP
ISSN journal
09570233
Volume
5
Issue
11
Year of publication
1994
Pages
1403 - 1406
Database
ISI
SICI code
0957-0233(1994)5:11<1403:ETIITS>2.0.ZU;2-1
Abstract
A simple modification to a scanning electron microscope is described w hich gives enhanced topography imaging on tilted specimens. The method makes use of forward scattered electrons to form an image of the surf ace of a specimen tilted at about 60 degrees-85 degrees to the normal to the beam. Collection of the forward scattered electrons is by means of a collection plate connected to a high-stability DC current amplif ier.