C-axis oriented epitaxial YBa2Cu3O7-delta thin films (T-c of 88 K and
J(c) of 10(7) A/cm(2) at 77K) were deposited on (100) MgO and SrTiO3 s
ubstrates using magnetron sputtering. Their structural properties, stu
died by x-ray diffraction, scanning electron microscopy, atomic force
microscopy, Rutherford backscattering, and transmission electron micro
scopy, will be reported. The TEM study indicates a high density of nan
ometer-sized Y2O3 precipitates in these films, which can act as effect
ive pinning centers and lead to the very large critical current densit
ies observed in these films. (C) 1997 Academic Press Limited.