DIRECT, SIMULTANEOUS DETERMINATION OF XPS BACKGROUND AND INELASTIC DIFFERENTIAL CROSS-SECTION USING TOUGAARDS ALGORITHM

A simple, practical method of directly determining both the XPS backgr ound and the inelastic differential cross section has been proposed. T he method uses the algorithm developed by Tougaard [S. Tougaard, J. El ectron Spectrosc. Relat. Phenom. 52 (1990) 243]. if the inelastic mean -free path is given, one can obtain a realistic, inelastic differentia l cross section of the system without further system-specific assumpti ons, by an optimization based on two quite natural aspects of the true spectrum: (1) The peak intensity should be proportional to its excita tion probability, and (2) no intensity should be observed outside the peak after background removal. As a first example, Al and Au metal spe ctra have been analyzed.