We describe homoepitaxial growth and detailed in situ characterization
of MgO(001). We have used, for the first time, high-speed Auger elect
ron spectroscopy as a real-time probe of film composition during growt
h. Excellent short-range and long-range crystallographic order are ach
ieved in films grown to a thickness of several hundred angstroms in th
e substrate temperature range of 450 degrees C to 750 degrees C. Moreo
ver, the films become more laminar as the growth temperature increases
, suggesting that MgO grows homoepitaxially by the step-flow growth me
chanism at elevated temperature. The surfaces of films grown at 650 de
grees and 750 degrees C are smoother than those obtained by cleaving M
gO(001).