TOLERANCES IN MICROLENS FABRICATION BY MULTILEVEL ETCHING AND MASS-TRANSPORT SMOOTHING

Authors
LIAU ZL NAM DW WAARTS RG
Citation
Zl. Liau et al., TOLERANCES IN MICROLENS FABRICATION BY MULTILEVEL ETCHING AND MASS-TRANSPORT SMOOTHING, Applied optics, 33(31), 1994, pp. 7371-7376
Citations number
20
Categorie Soggetti
Optics
Journal title
Applied optics → ACNP
ISSN journal
00036935
Volume
33
Issue
31
Year of publication
1994
Pages
7371 - 7376
Database
ISI
SICI code
0003-6935(1994)33:31<7371:TIMFBM>2.0.ZU;2-6
Abstract
A method is developed for the quantitative assessment of microlens def iciencies caused by inaccuracies in the multistep mesa fabrication or by incomplete mass-transport smoothing. Analytical expressions are obt ained and tolerable imperfections are deduced for the practical effort -saving fabrication of high-performance micro-optical elements.