DEPTH DISTRIBUTIONS OF HEAVY-IONS IN LINBO3 AND KTIOPO4 AT TILTED ANGLE IMPLANTATION

200 keV Hg and 1000 keV Xe ions were implanted into LiNbO3 and KTiOPO4 at a tilted angle. The depth distributions of Hg and Xe ions in LiNbO 3 and KTiOPO4 were measured by Rutherford backscattering of MeV He ion s. The experimental ion distributions are compared with the transport of ions in matter (TRIM'89) simulation. The result shows a slight diff erence in the peak position between the experimental and theoretical i on distribution, but the form of the experimental ion distribution is found to be in agreement with the theoretical one predicted by TRIM'89 except for a different width in the case of LiNbO3. The FWHM (full wi dth at half maximum) of the experimental ion distribution is larger th an the theoretical one given by TRIM'89 in the case of KTiOPO4. The la teral spreads obtained are compared using different calculation proced ures.