ATOMIC-FORCE MICROSCOPE USING PIEZORESISTIVE CANTILEVERS AND COMBINEDWITH A SCANNING ELECTRON-MICROSCOPE

We demonstrate the use of piezoresistive cantilevers with an atomic fo rce microscope that operates in conjunction with a scanning electron m icroscope. This is a very attractive combination because the two micro scopes complement each other in terms of depth and lateral resolution, field of view speed, and ability to image insulating surfaces. Images of a grating and an integrated circuit are shown as examples. Simulta neous operation in real time was achieved. (C) 1994 American Institute of Physics.