EFFECT OF HYDROGEN DILUTION ON THE BONDING CONFIGURATIONS IN ALPHA-SIC-H

Authors
OUWENS JD SCHROPP REI VANDERWEG WF
Citation
Jd. Ouwens et al., EFFECT OF HYDROGEN DILUTION ON THE BONDING CONFIGURATIONS IN ALPHA-SIC-H, Solid state communications, 92(11), 1994, pp. 853-855
Citations number
19
Categorie Soggetti
Physics, Condensed Matter
Journal title
Solid state communications → ACNP
ISSN journal
00381098
Volume
92
Issue
11
Year of publication
1994
Pages
853 - 855
Database
ISI
SICI code
0038-1098(1994)92:11<853:EOHDOT>2.0.ZU;2-6
Abstract
We have studied the effect of hydrogen dilution of the rf glow dischar ge gas mixture on the properties of amorphous silicon carbon a-Si1-xCx :H films. The chemical bonding structure has been determined from infr a-red (IR) absorption structural analysis. Elastic Recoil Detection (E RD) was used to determine the composition. It is shown that hydrogen d ilution reduces the density of C-C bonds rather than the density of CH n species.