LITHOGRAPHIC FORMATION OF YBA2CU3O7-D THI N-FILMS BY A WET PROCESS

Authors
PRACHAROVA J ZOUBKOVA J KUZNIK J GREGOR V MATEJKA F MATEJKOVA J
Citation
J. Pracharova et al., LITHOGRAPHIC FORMATION OF YBA2CU3O7-D THI N-FILMS BY A WET PROCESS, Chemicke listy, 88(11), 1994, pp. 738-740
Citations number
4
Categorie Soggetti
Chemistry
Journal title
Chemicke listy → ACNP
ISSN journal
00092770
Volume
88
Issue
11
Year of publication
1994
Pages
738 - 740
Database
ISI
SICI code
0009-2770(1994)88:11<738:LFOYTN>2.0.ZU;2-3
Abstract
The technology of microbridges preparation was developed on 7Ba(2)Cu(3 )O(7-d) epitaxial thin films. The optical lithography was used with th e positive resist SCR 15. H3PO4 (85 %) acid diluted in ratio 1:300 was used for etching. To reach the resolution of approximate to 1 mu m, a n original process based on NaOH, as an etching interrupting agent was developed.